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本文论述了微型箔式应变计的工艺特点和用光化学法制微型箔式应变计的主要工艺问题。通过实践,认为采用正性光刻胶和高浓度三氯化铁腐蚀液的制片工艺,可获得高质量的微型应变计敏感栅。文中还针对微型应变计的特点,论述了使用微型应变计时在测量电阻、贴片定位、粘结剂用量、指压方法、焊接导线、桥压控制等方面应注意的问题。
This paper discusses the process characteristics of micro-foil strain gauge and the main process of micro-foil strain gauge with photochemical method. Through practice, it is considered that a high-quality miniature strain gauge sensitive grid can be obtained by using a positive resist and a high-concentration ferric chloride etching solution. In this paper, the characteristics of miniature strain gauge are also discussed. Some problems that should be paid attention to in the measurement of resistance, patch positioning, adhesive dosage, finger pressure method, welding wire and bridge pressure control are discussed.