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GEM(Gas Electron Multiplier)探测器是一种广泛应用于高能物理以及核物理实验领域的微结构气体探测器。作为漂移室的替代者,GEM探测器更易于生产,具有更高的位置分辨率;CERN生产的GEM探测器典型位置分辨已达75μm。GEM探测器的核心部件是一种类似三明治结构的膜,如图1所示,膜两侧为5μm厚的铜层,中间层为50μm厚的PI膜,膜上分布有双锥形孔。
GEM (Gas Electron Multiplier) detector is a widely used in high-energy physics and nuclear physics experiments microstructure gas detector. As an alternative to the drift chamber, GEM detectors are easier to produce and have higher position resolution; the typical position resolution of GEM detectors manufactured by CERN has reached 75 μm. The heart of the GEM detector is a sandwich-like membrane, as shown in Figure 1, with a 5μm thick copper layer on each side of the membrane and a 50μm thick PI membrane on the middle layer with double tapered pores.