With the critical charge reduced to generate a single event effect(SEE) and high working frequency for a nanometer integrated circuit,the single event effect(SET) becomes increasingly serious for high performance SOC and DSP chips.To analyze the radiation-hardened method of SET for the nanometer integrated circuit,the n~+ guard ring and p~+ guard ring have been adopted in the layout for a 65 nm commercial radiation-hardened standard cell library.The weakest driving capacity inverter cell was used to evaluate the single event transient(SET) pulse-width distribution.We employed a dual-lane measurement circuit to get more accurate SET’S pulsewidth.Six kinds of ions,which provide LETs of 12.5,22.5,32.5,42,63,and 79.5 MeV·cm~2/mg,respectively,have been utilized to irradiate the SET test circuit in the Beijing Tandem Accelerator Nuclear Physics National Laboratory.The testing results reveal that the pulse-width of most SETs is shorter than 400 ps in the range of LET_(eff) from 12.5 MeV·cm~2/mg to 79.5 MeV·cm~2/mg and the pulse-width presents saturation tendency when the effective linear energy transfer(LET_(eff)) value is larger than 40 MeV·cm~2/mg.The test results also show that the hardened commercial standard cell’s pulse-width concentrates on 33 to 264 ps,which decreases by 40% compared to the pulse-width of the 65 nm commercial unhardened standard cell. With the critical charge reduced to generate a single event effect (SEE) and high working frequency for a nanometer integrated circuit, the single event effect (SET) becomes increasingly serious for high performance SOC and DSP chips. To analyze the radiation-hardened method of SET for the nanometer integrated circuit, the n ~ + guard ring and p ~ + guard ring have been adopted in the layout for a 65 nm commercial radiation-hardened standard cell library. Weakest driving capacity inverter cell was used to evaluate the single event transient (SET) pulse-width distribution. We employed a dual-lane measurement circuit to get more accurate SET’S pulsewidth. Six kinds of ions, which provide LETs of 12.5, 22.5, 32.5, 42, 63, and 79.5 MeV · cm ~ 2 / mg, respectively, have been utilized to irradiate the SET test circuit in the Beijing Tandem Accelerator Nuclear Physics National Laboratory. The testing results reveal that the pulse-width of most SETs is shorter than 400 ps in the range of LET_ (eff) from 12.5 MeV · cm ~ 2 / mg to 79.5 MeV · cm ~ 2 / mg and the pulse-width presents saturation tendency when the effective linear energy transfer (LET_ (eff)) value is larger than 40 MeV · cm ~ 2 / mg. that the hardened commercial standard cell’s pulse-width concentrates on 33 to 264 ps, which decreases by 40% compared to the pulse-width of 65 nm commercial unhardened standard cell.