直线型感应同步器的精度主要取决于尺子的复制精度,我们以聚乙烯醇—重铬酸铵感光胶做为保护层,采用0.3%柠檬酸水溶液做为显影剂,通过选用负误差模版,或在曝光前将基板升降温的方法提高尺子的复制精度,获得了满意的效果,0级到1级尺达90%左右,工艺稳定,除此之外我们还通过实验的方法,确定了感应同步器尺子设计尺寸的修正公式,为今后设计高精室的感应同步器提供了依据。 The accuracy of the linear induction synchronizer depends mainly on the accuracy of the ruler. We use polyvinyl alcohol - ammonium bichromate as the protective layer, 0.3% aqueous citric acid solution as developer, negative selection template or Raise the temperature of the substrate before the exposure method to improve the accuracy of the ruler to obtain satisfactory results, 0 to 1 level up to about 90%, the process is stable, in addition we also through the experimental method to determine the induction synchronization The correction formula of the size of the ruler design provides the basis for designing the induction synchronizer of the high precision chamber in the future.