六氟化钨是钨的氟化物中唯一稳定且被工业化应用的品种,它在电子工业、化学气相沉积技术、材料工业等领域应用广泛,本文主要介绍了六氟化钨的性质及应用,并且对六氟化钨产业的发展前景进行了概述。 Tungsten hexafluoride (Tungsten hexafluoride) is the only stable and industrially applicable species of fluoride in tungsten. It has been widely used in the electronics industry, chemical vapor deposition technology, material industry and other fields. This paper mainly introduces the properties and applications of tungsten hexafluoride The development of tungsten hexafluoride industry prospects are outlined.