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一、前言钢材中微观组织的碳元素精确测定,对控制工艺、而提高其综合性能有着十分重要的意义。然而,在扫描电镜中用波长色散谱仪对钢样中某些组织及特定微区的碳含量进行精确测定,却是一项比较困难的事。这主要是由于下面几方面的原因。 1.碳的污染: 由于电子束仪器中抽真空均使用二级抽真空系统,这样由碳氢化合物所组成的油,在油扩散泵工作时要蒸发而产生碳氢化合物分子。这些分子就沾附在试样表面,在电子
I. INTRODUCTION The precise determination of carbon in the microstructure of steel is very important for controlling the process and improving its overall performance. However, it is difficult to accurately measure the carbon content of certain tissues and specific domains in a steel sample by using a wavelength dispersive spectrometer in a scanning electron microscope. This is mainly due to the following reasons. 1. Carbon Pollution: Since vacuum pumping in electron beam instruments uses a two-stage vacuum system, hydrocarbons composed of hydrocarbons evaporate to produce hydrocarbon molecules while the oil diffusion pump is in operation. These molecules are attached to the surface of the sample, in the electron