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本文综述了金刚石热沉的发展过程,指出了开发金刚石薄膜热沉的意义,介绍了用直流电弧等离子体喷射法制备的金刚石薄膜的热性质以及金刚石薄膜热沉表面的抛光和金属化方法。
This paper reviews the development of diamond heat sink, points out the significance of developing diamond thin film heat sink, introduces the thermal properties of diamond thin films prepared by direct current arc plasma spraying and the polishing and metallization methods of diamond thin film heat sink.