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根据衍射光栅的标量理论,计算并讨论了金透射光栅在软X波段衍射效率对光栅厚度和占宽比的依赖关系.结果表明,选择合适的光栅槽深和占宽比,高达21.9%的衍射效率可能被获得,远高于振幅型光栅的+1级衍射效率10.14%.通过全息光刻与电镀转移技术制作的位相型金透射光栅由300 nm的聚酰亚胺薄膜支撑,光栅槽深200 nm,占宽比为0.55,周期为1μm,面积为20 mm×5 mm.在国家同步辐射装置上,测得其+1级透射衍射效率在波长λ=7.425 nm时获得最大值,约为16%.
According to the scalar theory of diffraction grating, the dependence of the diffraction efficiency of the gold transmission grating on the grating thickness and the aspect ratio is calculated and discussed. The results show that the diffraction grating height and the ratio of the width to the width of diffraction grating are up to 21.9% Efficiency may be obtained, much higher than the amplitude grating diffraction efficiency of 10.14% + 1. Phase holographic lithography and electroplating transfer technology produced by the phase-shift transmission grating 300 nm polyimide film support, grating groove depth 200 nm, the ratio of occupation is 0.55, the period is 1μm and the area is 20 mm × 5 mm. The transmission diffraction efficiency of the +1 order was obtained at the national synchrotron radiation device and reached the maximum at λ = 7.425 nm, which was about 16 %.