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用射频磁控溅射方法在有机柔性衬底上制备出好的附着性、低电阻率、高透射率ＺｎＯ∶Ａｌ的透明导电膜，研究了薄膜的结构、电学和光学特性．
The transparent conductive films with good adhesion, low resistivity and high transmittance of ZnO: Al were prepared by RF magnetron sputtering on organic flexible substrates. The structure, electrical and optical properties of the films were studied.