Optical and photo-carrier characterization of ultra-shallow junctions in silicon

来源 :中国科学：物理学、力学、天文学英文版 | 被引量 : 0次 | 上传用户：hakbin

【摘要】

：

Spectroscopic ellipsometry (SE), photocarrier radiometry (PCR) and photoluminescence (PL) techniques were employed to measure the ultra-shallow junction (USJ) w

【作者】

：

HUANG QiuPing LI BinCheng REN

【机构】

：

InstituteofOpticsandElectronics,UniversityofChineseAcademyofSciences

【出处】

：

中国科学：物理学、力学、天文学英文版

【发表日期】

：

2013年7期

【关键词】

：

光生载流子超浅结表征电子输运性质长PCR 光学注入能量表面复合速度 photocarrier radiometry spectroscopic e

【基金项目】

：

This work was supported by the National Natural Science Foundation of China （Grant Nos. 61076090 and 60676058）

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Spectroscopic ellipsometry (SE), photocarrier radiometry (PCR) and photoluminescence (PL) techniques were employed to measure the ultra-shallow junction (USJ) wafers. These USJ wafers were prepared by As+ ion implantation at energies of 0.5-5 keV, at a do

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Optical and photo-carrier characterization of ultra-shallow junctions in silicon

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