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针对环面蜗杆检测仪系统控制及定位精度的需要,采用Cortex-M4作为主控制器,控制步进电机驱动载物台运动,步进电机采用闭环控制。光栅尺实时检测XYZ导轨的位置信息,并把光栅信号作为反馈信号,构成闭环运动控制系统,实现坐标系中XYZ轴的运动和时栅转台旋转的高精度定位。步进电机的驱动采用软硬件细分方法,克服了步进电机爬行和丢步现象。实验表明:该系统采用全闭环控制、步进电机软硬件细分方法,实现了三坐标轴±2μm的精密定位,保证了环面蜗杆检测仪的准确测量。
Aiming at the need of control and positioning accuracy of toroidal worm detector system, the Cortex-M4 was used as the main controller to control the stepper motor to drive the stage motion. The stepper motor was closed-loop controlled. Grating ruler real-time detection of XYZ rail position information, and the grating signal as a feedback signal to form a closed-loop motion control system to achieve coordinate system XYZ axis movement and time-grating rotary turret high-precision positioning. Stepper motor drive using hardware and software subdivision method to overcome the creeping and lost stepper motor stepper phenomenon. Experiments show that the system uses full closed-loop control, stepper motor hardware and software subdivision method to achieve a ± 2μm coordinate axis precise positioning to ensure the accurate measurement of toroidal worm detector.