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用前向反冲方法和高能非Ｒｕｔｈｅｒｆｏｒｄ背散射方法研究了磁控溅射制备的Ｔｉ－Ｍｏ合金薄膜的氢化性能和碳、氧污染的影响。掺Ｍｏ的Ｔｉ合金薄膜不仅能大大减低碳的污染，而且较纯钛有较高的吸氢性能．合金氢化后由δ相氢化物和β相固溶体组成．随着Ｍｏ成分增加，合金中的β－（Ｔｉ，Ｍｏ）含量上升．当Ｍｏ含量（原子分数，％）约２０时可形成单一的β相固溶体，此时氢含量（原子分数，％）仍可在４５以上．Ｔｉ－Ｍｏ合金薄膜同时也具有良好的附着力和抗粉化性能。
The hydrogenation performance and carbon and oxygen pollution of Ti-Mo alloy films prepared by magnetron sputtering were studied by forward recoil method and high energy non-Rutherford backscattering method. The Mo-doped Ti alloy film not only can greatly reduce carbon pollution, but also has higher hydrogen absorption capacity than pure titanium. The alloy is composed of δ-phase hydride and β-phase solid solution after hydrogenation. As the Mo composition increases, the content of β- (Ti, Mo) in the alloy increases. When the content of Mo (atomic fraction,%) is about 20, a single β phase solid solution can be formed, and the hydrogen content (atomic fraction,%) can still be above 45 at this time. Ti-Mo alloy film also has good adhesion and anti-chalking properties.