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在观察与分析压入过程中CVD金刚石膜开裂方式的基础上，初步探讨了用压痕试验法评定CVD金刚石膜粘附性能的可行性．采用反映膜／基粘附性能的临界开裂或剥落载荷Per和抗裂性参数dP／dX两指标评定了硬质合金基体表面经不同预处理方法和沉积工艺参数合成的金刚石膜的粘附性能；研究了粘附性能指标与沉积工艺参数（如甲烷浓度、沉积气压、沉积功率）之间的关系．适当的表面预处理、适中的甲烷浓度、较低的沉积气压、较高的沉积功率均有利于改善金刚石膜的粘附性能．
On the basis of observing and analyzing the cracking mode of CVD diamond film during press-in process, the feasibility of evaluating the adhesion of CVD diamond film by indentation test was discussed. The adhesion properties of diamond films synthesized by different pretreatment methods and deposition process parameters on the cemented carbide substrates were evaluated by using the critical cracking or peeling load Per and the dP / dX parameters which reflect the film / substrate adhesion properties. The relationship between the adhesion performance index and deposition process parameters (such as methane concentration, deposition pressure, deposition power) was studied. Appropriate surface pretreatment, moderate methane concentration, lower deposition pressure, higher deposition power are conducive to improving the adhesion of diamond films.