激光定位是电子束曝光机中关键一环,本文着重分析了高精度双频激光定位原理、结构及系统误差。本系统为双光路结构,定位误差小,光路中采用了光学二倍频,定位分辨率高。电路中应用随时相减处理两路脉冲信号,结构简便、数据处理速度快、性能可靠、运行控制及误差处理全部自动完成。定位分辨率0.02微米。 Laser positioning is a key part of electron beam lithography. This paper focuses on the principle, structure and system error of high-precision dual-frequency laser. The system is dual optical structure, positioning error is small, the optical path used in optical double frequency, high positioning resolution. The application of the circuit subtracts two pulse signals from time to time, the structure is simple, the data processing speed is fast, the performance is reliable, the operation control and the error processing are all completed automatically. Positioning resolution of 0.02 microns.