近年来,古老的光学干涉仪检测技术与现代化电子技术和计算机技术相结合,出现了商品化的实时激光数字干涉仪。检测精度达到峰值误差1/100λ,均方根误差1/1000入(入=6328A)。它标志着光学测试技术发展的新水平,代表着光学测试仪器的一个发展方向。本文通过介绍两种代表八十年代水平的典型的商品化激光数字干涉仪,说明这一新技术的原理和概况。 In recent years, the ancient optical interferometer detection technology combined with modern electronic technology and computer technology, there has been a commercial real-time laser digital interferometer. Detection accuracy peak error 1 / 100λ, root mean square error 1/1000 into (into = 6328A). It marks the development of optical testing technology to a new level, representing a direction of development of optical test equipment. This article describes the principle and overview of this new technology by introducing two typical commercially available laser digital interferometers that represent the 1980s.