本文综述了电子能谱法、二次离子质谱法、核实验技术、光谱法及分光光度法分析膜层的组分化学式量比及杂质的分布,以及膜层的厚度、折射率、密度、应力、针孔、腐蚀,速率、台阶覆盖的物理测试方法;简要叙述部分测试方法的基本原理,着重介绍实用技术。 In this paper, the electron-spectroscopy, secondary ion mass spectrometry, nuclear experimental techniques, spectroscopy and spectrophotometry were used to analyze the compositional ratio of chemical layers and the distribution of impurities, as well as the thickness, refractive index, density, , Pinhole, corrosion, velocity, step coverage of the physical test methods; a brief description of some of the basic principles of test methods, with emphasis on practical technology.