论文部分内容阅读
对涡轮分子泵的性能作了简单的总结之后就开始考虑到设计一种新式的高效涡轮分子泵。通过提高转子的转速或者改进转子叶轮的几何形状,就能提高抽速。压缩比和抽速之间的关系是设计新式涡轮分子泵的决定性因素。对氢气的压缩比在低于300时就会造成对轻气体(H2,He)的抽速的显著下降。 由所能达到的最大有效抽速和维修问题来决定是卧式转子还是立式转子。本文指出,目前先进的高效涡轮分子泵应该是卧式双转子、不透光性的叶轮结构、合适的最佳泵体和由电子传动。
After a brief summary of the performance of the turbomolecular pump, we began to consider the design of a new type of high efficiency turbomolecular pump. Pumping speed can be increased by increasing the rotor speed or by improving the geometry of the rotor impeller. The relationship between compression ratio and pumping speed is a decisive factor in designing a new turbomolecular pump. Hydrogen compression ratios below 300 result in a significant drop in the pumping speed of light gases (H2, He). Depending on the maximum effective pumping speed and maintenance issues that can be achieved, the horizontal rotor or the vertical rotor can be determined. This paper points out that the current advanced high efficiency turbo molecular pump should be a horizontal dual rotor, opaque impeller structure, suitable for the best pump body and by the electronic drive.