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复合电磁靶是由两个电磁铁分别产生两个圆环状跑道磁场的新型磁控靶。两个跑道磁场的水平磁场均可连续调节，对应两个跑道磁场分别安装Ａ和Ｂ两种纯金属靶材，即可镀制合金膜。调节两个跑道磁场的场强对比，即可实现膜层的成分调节。复合电磁靶可以溅射７ｍｍ厚的铁靶。复合电磁靶的应用实例是镀制二元合金系统的变成分合金膜。
The composite electromagnetic target is a new type of magnetron target that generates two annular raceway magnetic fields respectively by two electromagnets. The horizontal magnetic field of the two runway magnetic fields can be adjusted continuously, and the two pure metal targets A and B are respectively installed corresponding to two runway magnetic fields to coat the alloy film. Adjust the field strength of two runway magnetic field contrast, you can adjust the composition of the film. Composite electromagnetic target can sputter 7mm thick iron target. An example of a composite electromagnetic target is the formation of a binary alloy system into a sub-alloy film.