1960年以来,外延生长技术作为半导体工业的一个重要部分,有了很快的发展。在现在,硅晶体管及二极管的大部分不必说,集成电路也都是用外延生长法的。就是对晶体三极管,它是用在低电阻率的基板上生长任意电阻率的外延层的圆片的,因而有饱和电压低,及 Since 1960, epitaxial growth technology has developed rapidly as an important part of the semiconductor industry. Now, most of the silicon transistors and diodes needless to say, integrated circuits are also used epitaxial growth method. Is a transistor that grows on a wafer of an epitaxial layer of arbitrary resistivity on a substrate of low resistivity and thus has a low saturation voltage and