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提出一种新颖的基于光栅±1级干涉和相位载波(PGC)调制解调的光学加速度传感方案,并进行了样机制作和测试,其分辨率达到4×10-5gn量级以上,动态范围在光学结构中不受限制,仅与惯性传感中机械结构线性范围有关。与其他类型微加速度计相比,该光学加速度传感器不但在分辨率和动态范围上均获得较大的提高,而且利用光栅干涉进行加速度传感能很好地保证干涉的稳定性,从而提高工作稳定性,降低对安装精度的要求。该方案还可以应用到微电子机械系统(MEMS)技术中,为设计高分辨率大量程微光机电系统(MOEMS)型加速度计,提供了新的思路。
A novel optical acceleration sensing scheme based on grating ± level 1 interference and phase carrier (PGC) modulation and demodulation is proposed. The prototype is fabricated and tested with a resolution of more than 4 × 10-5gn. The dynamic range In the optical structure is not limited, only inertial sensing in the mechanical structure of the linear range. Compared with other types of micro-accelerometers, this optical accelerometer not only achieves a great improvement in resolution and dynamic range, but also accelerates the sensing by using the grating interference to ensure the stability of interference and improve the work stability To reduce the need for installation accuracy. This scheme can also be applied to micro-electro-mechanical systems (MEMS) technology, providing a new idea for designing high-resolution large-scale MOEMS accelerometers.