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本文所述的是一种新颖的过渡金属和稀土金属离子源的设计及应用。离子是由逸散的金属原子与快速电子碰撞后产生的。此源的主要特性为:(1)离子的能量为(1-20)keV;(2)总离子电流为(1-25)×10~(-6)A;(3)离子电流的稳定度为0.1%;(4)束横截面直径为(1-12)mm;(5)在超高真空条件下,1克金属的载荷可连续工作(30-60)小时。该离子源的特点是能产生多电荷金属离子M~(q+)(q=1-6),其中一部分离子处于亚稳受激态。这些都证明了此源的效果和实际的可能应用。
This article describes a novel transition metal and rare earth metal ion source design and application. Ions are generated by the escape of escaped metal atoms and rapid electron collisions. The main characteristics of this source are: (1) the ion energy is (1-20) keV; (2) the total ion current is (1-25) × 10 -6 A; (3) the stability of the ionic current 0.1%; (4) Beam cross-section diameter (1-12) mm; (5) In the ultra-high vacuum conditions, the load of 1 gram of metal can work continuously (30-60) hours. The ion source is characterized by the generation of multi-charged metal ions M ~ (q +) (q = 1-6), some of which are metastable excited state. All these prove the effectiveness of this source and the actual possible application.