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本文分析了各种静电聚焦——偏转器系统,特别研究了静电MOL系统的电子光学性能.提出了一种实用的MOL系统结构,该系统中部份电极做成对称八瓣电极形式,加以适当电压后同时用作透镜电极和偏转器.文中分析了这种MOL系统的电场及电子光学性能,利用这种MOL系统设计了特短的小型扫描电子探针系统.这种系统可在2×2mm~2的扫描范围获得1μm的理论分辨能力.
In this paper, various kinds of electrostatic focus-deflector systems are analyzed, and the electronic optical properties of the MOL system are especially studied. A practical MOL system structure is proposed, in which some electrodes are made in the form of symmetrical eight- The voltage is used as both the lens electrode and the deflector at the same time.This paper analyzes the electric field and the electro-optical properties of the MOL system, and uses this MOL system to design a very short small-sized scanning electron probe system which can measure at 2 × 2mm ~ 2 scan range to obtain 1μm theoretical resolution.