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为实现对光学元件表面疵病的精确测量和计数,提出了一种基于多光谱技术的光学元件表面疵病检测方法,该方法采用不同波长的入射光源均匀照明光学元件表面,通过暗场显微成像系统获得不同波长下的表面疵病图像。基于该方法研制了多光谱光学元件表面疵病检测系统,获得了365,405,436,486,550nm单波长光以及白光照明条件下光学样品表面疵病和标准样品图形的检测实验结果。实验结果表明,相比传统的白光照明检测技术,多光谱检测技术根据不同的材料性质选用不同波长的光作为入射光源,可以明显提高系统对光学元件表面疵病的检测能力,不仅可以提高测量精度,而且可以获取白光照明下无法检测到的疵病信息。
In order to achieve the accurate measurement and counting of the optical element surface flaw, a multi-spectral optical flaw detection method based on multispectral technology is proposed. The method uses different incident wavelengths to illuminate the optical element surface evenly, The imaging system obtains surface flaw images at different wavelengths. Based on this method, a multi-spectral optical element surface flaw detection system was developed, and the experimental results of the detection of optical flaw and standard sample of single-wavelength light at 365, 405, 436, 486 and 550 nm and white light illumination were obtained. The experimental results show that compared with the traditional white light detection technology, the multi-spectral detection technology selects different wavelengths of light as the incident light source according to different material properties, which can obviously improve the detection capability of the system on the optical element surface flaw, thus not only improving the measurement accuracy , But also get flaw information that can not be detected under white lighting.