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用直流磁控溅射制备了Tb／Co成分调制膜膜调制结构的形成与靶的溅射速率和衬底转速密切相关对不同周期的Tb／Co膜的极向Kerr磁滞回线进行了测量，结果表明：当Tb／Co膜的周期较小时，薄膜具有垂直方向的磁各向异性、较大的矫顽力和较大的磁光效应；当Tb／Co膜的周期较大时，上述性能变差。其机制可以用界面处Tb原子的单离子各向异性和Tb，Co原子间的的铁磁耦合来解释．当300℃真空等温退火时，Tb／Co成分调制膜的热稳定性较差．
The formation of modulation structure of Tb / Co composition films by direct current magnetron sputtering was closely related to the sputtering rate and substrate rotation speed of the target. The Kerr hysteresis loops of Tb / Co films with different periods were measured The results show that the thin film has perpendicular magnetic anisotropy, larger coercivity and larger magneto-optical effect when the Tb / Co film has a smaller period. When the period of the Tb / Co film is large, Poor performance. The mechanism can be explained by the single ion anisotropy of Tb atom at the interface and the ferromagnetic coupling between Tb and Co atoms. When 300 ℃ vacuum isothermal annealing, Tb / Co composition of the film thermal stability is poor.