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Nikon宣布和Tokyo Electron达成协议,共同开发与曝光系统有关的液体沉浸曝光技术。自从2001年以来,这两个公司已经共享评估系统,以提高工艺性能。这个新协议标志着它们的合作达到新的阶段。根据协议,在曝光技术方面处于领先的Nikon,将与在抗蚀剂涂料器/显影剂和高级元素技术方面拥有大量市场份额的Tokoy Electron,在开发液体沉浸曝光技术方面共享
Nikon Announces Agreement with Tokyo Electron to Develop Liquid Immersion Exposure Technology Related to Exposure Systems. Since 2001, the two companies have already shared an evaluation system to improve process performance. This new agreement marks a new phase in their cooperation. Under the terms of the agreement, Nikon, the leader in exposure technology, will share Tokna Electron’s development of liquid immersion exposure technology with Tokoy Electron, which has a significant market share in resist coater / developer and advanced elemental technology