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相移雅满横向剪切干涉仪非常适合于达到衍射极限的光束的波面检测。为了改进现有的在两路剪切光束中直接插入起偏器的相移雅满剪切干涉仪,提出了一种基于偏振合束的相移雅满剪切干涉仪。该剪切干涉仪利用雅满平板前后表面的反射进行分束并形成两路干涉光束,两路干涉光束分别通过剪切平板后偏振合束并进行偏振移相。它保持了常规雅满剪切干涉仪的光路结构,提高了剪切干涉图的对比度,不再存在插入起偏器引入测量误差的问题。构建了改进前、后的两种相移雅满双剪切干涉仪,并进行了相应的对比实验,实验结果很好地验证了基于偏振合束的相移雅满剪切干涉仪的实用性。
Phase shift Yam transverse shearing interferometer is very suitable for the detection of the wavefront of the beam reaching the diffraction limit. In order to improve the existing phase-shifting Yaman shear interferometer which is directly inserted into the polarizer in the two-way shear beam, a phase-shifting Masonic shear interferometer based on polarization beam-splitting is proposed. The shearing interferometer uses the reflection of the front and back surfaces of the Yaman slab to split and form two interfering beams. The two interfering beams pass through the slab post-polarizer and are phase-shifted. It maintains the optical structure of the conventional Masamichi shearing interferometer and improves the contrast of the shear interferogram. There is no longer the problem of inserting measurement polarizer into the analyzer. The two kinds of phase shift Yaman double shearing interferometer before and after the improvement were constructed, and the corresponding comparative experiments were carried out. The experimental results well verified the practicability of the phase shift Yaman shear interferometer based on the polarization combination .