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应用Ｘ－射线双晶衍射对磁控溅射法制备的ＹＢａ_２Ｃｕ_３Ｏ_（７－ｘ）／ＳｒＴｉＯ_３超导外延膜和衬底之间的位向关系以及晶体完整性的研究，表明衬底和外延在相应的衍射面之间存在与两者点阵常数差无关的位向差。这种位向差与测量方向（φ角）有关，在孪晶界方向出现极值。外延摇摆曲线的半峰宽值显示外延完整性较差，其值与测量方向有关，而不同方向上的点阵常数变化却不大。这可能分别与孪晶存在和孪晶有择优取向以及外延镶嵌块间夹角变化有关。
X-ray double crystal diffraction on the YBa_2Cu_3O_ (7-x) / SrTiO_3 superconducting film prepared by magnetron sputtering and the substrate orientation and crystal integrity between the study showed that the substrate and epitaxial growth in the corresponding Of the diffractive surface exists between the two lattice constant difference unrelated to the direction of the difference. This difference in orientation is related to the direction of measurement (φ angle), with extreme values in the twin boundary. The full width at half maximum of the epitaxial rocking curve shows poor epitaxial integrity, the value of which depends on the measuring direction, but the lattice constant in different directions does not change much. This may be related to the presence of twins and twin preferred orientation and the angle between the extension of the mosaic blocks.