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在对影响射频氢气电离器效率的工艺问题进行研究的基础上,研制了一种将直流磁场加到射频等离子体的电离器,然后测定磁场对等离子体的影响。人们发现,采用这种结构型式,电离器的功耗明显降低。利用直流磁场,还可以使效率保持在固定水平上,同时降低氢气压力。根据这些研究结果,对研制一种耗氢量低、射频功耗小的电离器进行某些探讨。
Based on the research of the process problems affecting the efficiency of radio frequency hydrogen ionizer, a kind of ionizer for applying DC magnetic field to radio frequency plasma was developed, and then the effect of magnetic field on plasma was measured. It has been found that with this type of structure, the power consumption of the ionizer is significantly reduced. With a DC magnetic field, the efficiency can also be kept at a fixed level while reducing hydrogen pressure. According to the results of these studies, some studies on the development of an ionizer with low consumption of hydrogen and low RF power consumption are carried out.