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大规模与超大规模集成电路在现代科学技术中占有人所共知的重要地位,利用束技木来制造集成电路是集成工艺中值得注意的发展方向,本期柳襄怀同志一文对此作了比较全面的介绍。
Large-scale and very large-scale integrated circuits in the modern science and technology occupy an important position known to all, the use of beam technology to manufacture integrated circuits integrated technology is a noteworthy direction of development, this article Comrade Liu Xianghuai made this More comprehensive introduction.