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提出一种通过双光束干涉条纹间距来确定CCD靶面的有效尺寸及有效象素间距的方法。详细介绍了该方法的原理,通过实验测量了所用面阵CCD靶面有效宽度,并验证了测量结果。
A method of determining the effective size and the effective pixel pitch of the CCD target surface by the spacing of the two beam interference fringes is proposed. The principle of this method is introduced in detail. The effective width of the target area of CCD is measured experimentally and the measurement results are verified.