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论述了氧化铝薄膜电容湿度传感器的性能，提出了采用α－Ａｌ２Ｏ３薄膜作湿敏层的新型氧化铝薄膜湿度传感器，简述了该湿敏元件的制备方法和基本特性。最后讨论了目前尚存在的问题。
The performance of alumina film capacitive humidity sensor is discussed. A new type of alumina film humidity sensor using α-Al2O3 film as humidity sensitive layer is proposed. The preparation method and basic characteristics of the sensor are described briefly. Finally, the existing problems are discussed.