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光栅光阀是一种基于微型机电系统(MEMS)工艺的光调制器,利用其表面具有的可选择的变形部分(可动光阀),提供衍射光栅,被应用于投影显示等领域。光栅光阀的光学性能决定其在投影显示系统中应用的成败。依据多光束干涉理论和衍射理论对光栅光阀工作状态的光学特性进行了详细的理论分析和计算机仿真。结果说明,光栅光阀在工作中处于“开”态时,可动光阀下降的距离应该是入射波长的1/4倍;设计时选择h=0λ/2,δ=0λ/4;当间隙处的反射率不同时,占空比对光栅光阀的光学特性有着不同的影响,给出了占空比与反射率的最佳组合值。
Grating A light valve is a type of light modulator based on a micro-electromechanical system (MEMS) process. It provides a diffraction grating that is used in the field of projection displays and the like by utilizing an optional deformation portion (movable light valve) provided on the surface thereof. The optical properties of a grating light valve determine its success in projection display systems. According to the multi-beam interference theory and diffraction theory, the optical characteristics of the working state of the grating light valve are analyzed in detail and the computer simulation is carried out. The results show that the grating light valve in the work in the “open” state, the movable light valve down the distance should be 1/4 wavelength of the incident wavelength; design choice h = 0λ / 2, δ = 0λ / 4; when the gap When the reflectivity is different, the duty cycle has different effects on the optical characteristics of the grating light valve, and the optimal combination of duty cycle and reflectivity is given.