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本文制备了基于ZnO纳米线阵列和ZnO薄膜的Ag-ZnO-Ag电导型X射线探测器件,研究了它们对X射线的响应特性.薄膜器件在100 V偏置时的响应度达到0.12μC/Gy,纳米线阵列器件在50 V偏压下的响应度达到0.17μC/Gy.器件工作机理研究表明,器件的响应过程与表面氧吸附与解吸附效应有关,氧气吸附与解吸附过程使得X射线辐照下的载流子寿命大幅度增加,从而使得器件对X射线具有较高的响应度.本文研究结果表明ZnO薄膜和纳米线阵列器件在X射线剂量测量领域具有应用前景.
In this paper, Ag-ZnO-Ag X-ray detectors based on ZnO nanowire arrays and ZnO thin films were fabricated and their response to X-ray was studied. The responsivities of thin film devices at 100 V bias were 0.12 μC / Gy , The response of nanowire array device reaches 0.17μC / Gy at a bias voltage of 50 V. Research on the working mechanism of the device shows that the response process of the device is related to the surface oxygen adsorption and desorption effect, the oxygen adsorption and desorption process makes the X-ray radiation The lifetime of carriers increases greatly, which makes the device highly responsive to X-ray.The results of this paper show that ZnO thin films and nanowire arrays have potential applications in the field of X-ray dose measurement.