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波长30.4 nm的He-II谱线是极紫外天文观测中最重要的谱线之一,空间极紫外太阳观测光学系统需要采用多层膜作为反射元件。为此研究了SiC/Mg、B4C/Mg、C/Mg、C/Al、Mo/Si、B4C/Si、SiC/Si、C/Si、Sc/Si等材料组合的多层膜在该波长处的反射性能。基于反射率最大与多层膜带宽最小的设计优化原则,选取了SiC/Mg作为膜系材料。采用直流磁控溅射技术制备了SiC/Mg多层膜,用X射线衍射仪测量了多层膜的周期厚度,用国家同步辐射计量站的反射率计测量了多层膜的反射率,在入射角12°时,实测30.4 nm处的反射率为38.0%。
The He-II line with a wavelength of 30.4 nm is one of the most important spectral lines in extreme ultraviolet astronomical observations. The space EUV solar optical system needs to use a multilayer film as the reflective element. For this reason, multilayer films of SiC / Mg, B4C / Mg, C / Mg, C / Al, Mo / Si, B4C / Si, SiC / Si, C / Si, The reflective properties. Based on the principle of design and optimization, which has the largest reflectivity and the smallest bandwidth of the multilayer film, SiC / Mg was selected as the film material. The SiC / Mg multilayers were prepared by DC magnetron sputtering. The thickness of multilayers was measured by X-ray diffractometer. The reflectivity of multilayers was measured by the reflectometer of the National Synchrotron Radiation Measurement Station. At an incident angle of 12 °, the reflectivity measured at 30.4 nm was 38.0%.