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电容式传感器在纳米级测试中得到了广泛的应用，但是对环境条件要求较高，检测中温、湿度的变化、传感器本身结构乃至其电路性能等因素，将直接影响测量的准确度和灵敏度。介绍了大型天体望远镜光学镜面面形的控制方法和工作原理。该大型天体望远镜Φ１０ｍ的主镜由３６块对角线长１．８ｍ的六角形子镜拼接而成，应用电容测微技术使此超大型镜面的共面性达到纳米量级的定位控制。通过检测原理的分析，阐述了电容式传感器在使用中提高其准确度和长期稳定性的理论分析和具体技术措施，并针对国内正在研制的ＬＡＭＯＳＴ超大型天体望远镜实际应用环境和技术指标要求，提出新的差动式传感器，并采用新材料和高集成度的进口新器件，以满足传感器在温、湿度变化大的条件下实时监测的要求。
Capacitive sensors have been widely used in nanoscale tests. However, the requirements of environmental conditions are high. The detection of changes in temperature and humidity, the structure of the sensor and its circuit performance will directly affect the accuracy and sensitivity of the measurement. The control method and working principle of the optical specular shape of large celestial telescope are introduced. The large celestial telescope Φ10m the main mirror by 36 diagonal length 1.8m hexagonal sub-mirror spliced together, the application of capacitance micrometer technology so that the super-large mirror coplanarity to nano-level positioning control. Through the analysis of detection principle, the theoretical analysis and specific technical measures to improve the accuracy and long-term stability of the capacitive sensor in use are described. According to the practical application environment and technical requirements of the LAMOST super large celestial telescope being developed domestically, The new differential sensors, and the introduction of new materials and highly integrated new devices to meet the sensor temperature and humidity changes in real-time monitoring requirements.