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超分辨近场结构(Super RENS)技术是在传统的超分辨光盘技术和近场光学的基础上发展起来的新技术。介绍了Super RENS技术的基本原理:利用掩膜层的非线性效应或表面等离子体增强效应,在近场区域可以记录、读出超过衍射极限的信号。综述了该技术在纳米光信息存储和光刻方面应用研究的最新进展,提出了存在的问题,展望了它的发展前景。
Super RENS technology is a new technology developed based on the traditional super-resolution optical disk technology and near-field optics. The basic principle of the Super RENS technology is introduced: utilizing the non-linear effect of the mask layer or the surface plasmon enhancement effect, signals exceeding the diffraction limit can be recorded and read out in the near field. The latest progress of the application of nano-optical information storage and photolithography is summarized, the existing problems are raised, and its development prospects are prospected.