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本文报导了用ＭＯＣＶＤ技术制备的ＺｎＳ：Ｍｎ电致发光薄膜为立方晶相，结晶取向性好，颗粒大．从高倍率的扫描电镜拍摄的照片观察到薄膜的表面平滑．ＳＩＭＳ测量表明Ｍｎ２＋在ＺｎＳ薄膜纵向分布均匀，但在两侧有起伏，可能的原因是在生长的初终阶段流量的突变使化合物的化学计量比偏离而产生位错，引起原子的局部堆积，并且由于初终阶段ＺｎＳ：Ｍｎ生长的衬底不同使原子堆积层厚度不同．
In this paper, we report that the ZnS: Mn electroluminescent thin films prepared by MOCVD have a cubic crystal phase with good crystallographic orientation and large particles. The surface of the film was observed to be smooth from photographs taken with a high magnification scanning electron microscope. SIMS measurements show that Mn2 + is uniformly distributed in the longitudinal direction of the ZnS thin film, but has fluctuation on both sides. The possible reason is that abrupt change in the flow rate at the beginning of the growth deviates the stoichiometry of the compound to generate dislocations, causing partial accumulation of atoms, The thickness of the atomic packing layer is different due to the different growth substrates of ZnS: Mn during the initial final stage.