对Ti6Al4V 合金进行温度范围从100 ℃到600 ℃,注入剂量为:4×1017ions.cm-2氮离子等离子体源离子注入(N-PSII)。用俄歇电子能谱仪(AES)对注入样品进行元素深度分布剖面分析。用显微硬度及针盘磨损试验机测试表面改性的效果。利用X 射线衍射(XRD)分析表面改性层晶相的变化。用光学显微镜观察磨痕宽度。分析发现,当温度从 100 ℃升到600 ℃时,注入层厚度明显增加。其中,高温注入时获得较高的表面硬度和较好抗磨损性。XRD分析发现,随温度升高注入层表面形成TiN和Ti2N析出相。 Ti6Al4V alloy temperature range from 100 ℃ to 600 ℃, the injection dose is: 4 × 1017ions.cm-2 nitrogen ion plasma source ion implantation (N-PSII). The elemental depth profiles of injected samples were analyzed by Auger electron spectroscopy (AES). The effect of surface modification was tested using a microhardness and dial wear tester. The change of crystal phase of the surface modification layer was analyzed by X-ray diffraction (XRD). The width of the wear scar was observed with an optical microscope. The analysis found that when the temperature rose from 100 ℃ to 600 ℃, the injection layer thickness increased significantly. Among them, high-temperature injection to obtain a higher surface hardness and better wear resistance. XRD analysis showed that TiN and Ti2N precipitates formed on the surface of the implanted layer as the temperature increased.