Clock rolling was developed to make deformation microstructure homogenize in high-purity Ta. The substructure of deformed Ta was revealed by electron back-scatter diffraction(EBSD) technique aided with triple focused ion beam(FIB). The results indicate that the triple FIB method can produce a mirror surface required by EBSD analysis. The clock rolling works well for the homogenization of deformed microstructure. Particularly,the local stored energy in {111} orientated grains is largely reduced by clock rolling, whereas it is enhanced in {100}orientated grains because of the occurrence of grain subdivision. The substructure of deformed Ta was revealed by electron back-scatter diffraction (EBSD) technique aided with triple focused ion beam (FIB). The results indicate that the triple FIB method Particularly, the local stored energy in {111} orientated grains is substantially reduced by clock rolling, it it is enhanced in {100} orientated grains because of the occurrence of grain subdivision.