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提出了一种基于微机械技术的微型电场传感器.该器件由振动部分和感应电极组成,通过静电梳齿结构驱动,并利用溅射到衬底的栅状金电极作为工作电极.基于SOI衬底加工的设计流程能够简化悬浮结构的制备.由于器件运动中受滑膜阻尼作用,因此可在大气下测试和封装,能够节约成本.阐述了器件的工作原理、结构仿真以及其键合/减薄工艺流程.该器件具有小尺寸和批量生产的优势,有望在安全预警和航天器升空环境探测等方面得以 应用.
A micro-electric field sensor based on micromechanical technology is proposed.The device consists of a vibrating part and a sensing electrode and is driven by an electrostatic comb structure and utilizes a grid-shaped gold electrode sputtered into the substrate as a working electrode. Based on the SOI substrate Processed design flows simplify the fabrication of suspended structures, which can be tested and packaged in the atmosphere for cost savings due to the synovial damping of the device during motion. The principle of the device, its structural simulation, and its bonding / thinning Process flow.The device has the advantages of small size and mass production and is expected to be applied in safety early warning and exploration of the spacecraft launch environment.