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为实现球面波干涉检测非球面镜片,得到非球面镜片的完整面形信息,提出了基于标记的Givens变换,实现环形子孔径的精确定位和消旋转的处理。利用求解目标函数最小值的方法精确求解拟合波面以对子孔径数据进行处理,建立了全局优化拼接数学模型。对外径150 mm,内径100 mm的抛物面镜片进行三孔径拼接检测实验,均方根值为0.053λ。对比补偿器法得到的全口径干涉检测结果均方根值ΔWrms=0.052λ,相对误差为1.92%。实验结果表明,该方法稳定可靠,降低了传统的环形子孔径拼接干涉检测方法中对导轨的高精度要求。
In order to detect aspherical lens by using spherical wave interference, the complete surface information of aspherical lens is obtained. A mark-based Givens transform is proposed to realize the precise positioning of annular sub-aperture and the processing of canceling rotation. The method of solving the minimum of the objective function is used to solve the fitting wave surface precisely to process the subaperture data, and a global optimization stitching mathematical model is established. A parabolic lens with an outer diameter of 150 mm and an inner diameter of 100 mm was used for three-hole splicing test. The root mean square value was 0.053λ. Compared with the compensator method, the root mean square value (RMS) of full-aperture interference detection is 0.052λ and the relative error is 1.92%. Experimental results show that the proposed method is stable and reliable, and reduces the high precision requirements of the guideway in the traditional annular sub-aperture splicing interference detection method.