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静电拉伸薄膜反射镜属于一种空间新概念超轻反射镜。成形控制是其关键技术,而面形分析是成形控制的基础。基于Karman方程分析了薄膜反射镜在均匀载荷作用下的面形,并推导了抛物面面形所需的非均匀载荷;对Ф300 mm口径薄膜反射镜进行了有限元建模,针对不同载荷作用下的薄膜拉伸面形进行了光机集成分析,反射镜中心挠度与理论计算吻合,反射镜在非均匀连续载荷作用下的波前差相对于均匀载荷作用降低了一个数量级,非均匀离散载荷下的面形也得到了改善。结果表明:薄膜反射镜在非均匀载荷下可以有效抑制像差并能控制薄膜成形。基于仿真结果设计了半解析薄膜反射镜成形控制的方法,为薄膜反射镜的成形控制提供了技术基础。
Electrostatic stretch film mirror belongs to a new concept of ultra-light reflector space. Forming control is its key technology, and surface analysis is the basis of forming control. Based on the Karman equation, the profile of thin film reflector under uniform load was analyzed and the nonuniform load of paraboloid was deduced. The finite element method of Ф300 mm thin film reflector was established. The results of optical-mechanical integration analysis of the stretched film surface of the film are consistent. The center deflection of the mirror is in agreement with the theoretical calculation. The wave front aberration of the mirror under uniform non-uniform load is reduced by one order of magnitude compared with the uniform load, Shape has also been improved. The results show that the film mirror can effectively suppress the aberration and control the film formation under non-uniform load. Based on the simulation results, the method of semi-analytical thin film reflector forming control is designed, which provides the technical foundation for the forming control of thin film reflector.