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锑基红外光敏材料具有优越的光电转换效率,材料结构稳定、可生产性强,并具备低暗电流和高工作温度(HOT)的优势,符合未来红外探测系统小尺寸、轻重量、低功耗(SWa P)的要求。目前,工程化研制高工作温度红外探测器的锑基材料主要有3类:InSb、锑基II类超晶格和InAsSb,国外已报道了640×512、1024×1024和2040×1156规格的焦平面阵列,工作温度提高到150 K以上。本文从材料特性和器件结构、像元尺寸及工艺技术来阐述国内外锑基高工作温度红外探测器的研究状况。
Antimony-based infrared light-sensitive materials with superior photoelectric conversion efficiency, stable material structure, high productivity, low dark current and high working temperature (HOT) advantages, in line with the future of infrared detection system, small size, light weight, low power consumption (SWa P) requirements. At present, there are mainly three types of antimony-based materials for engineering high-temperature infrared detectors: InSb, antimony-based II superlattices and InAsSb. Foreign countries have reported 640x512, 1024x1024 and 2040x1156 specifications of coke Flat array, operating temperature increased to 150 K above. In this paper, the research status of antimony-based high working temperature infrared detector at home and abroad is described from the material characteristics, device structure, pixel size and process technology.