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在洁净工程设计中,由于考虑节能问题,在层流型洁净室的送风墙上,高效空气过滤器所占的面积,由大于80%下降到40%左右,因此,按常规的评价方法,在洁净室整个断面上,风速均匀率要达到小于±20%是很困难的。本文认为,在评价速度场风速均匀性时,不应简单地对整个洁净室断面上的风速进行评价,而应在与送风墙有效送风边界区相对应的断面上来进行评价。另外还认为断面速度场的均匀性不宜以断面平均风速与最大(最小)风速差的百分比来表示。本文还提出了几项提高断面速度场均匀性的具体技术措施。
In the clean engineering design, due to the consideration of energy saving issues, the area occupied by the high-efficiency air filter on the air supply wall of the laminar clean room has dropped from more than 80% to about 40%. Therefore, according to the conventional evaluation method, In the entire cross section of the clean room, it is difficult to achieve a wind speed uniformity of less than ±20%. This article believes that in evaluating the velocity field velocity uniformity, the wind speed on the entire clean room cross section should not be evaluated, but should be evaluated on the cross section corresponding to the boundary area of the air supply wall. It is also considered that the uniformity of the cross-sectional velocity field should not be expressed as a percentage of the difference between the average cross-section wind speed and the maximum (minimum) wind speed difference. This article also proposes several specific technical measures to improve the uniformity of the section velocity field.