引言常规的电子互联制造的观念是采用同一溶液达到两个目的:保证溶液反应特性和反应物的交换与传递。前—个目的是提供工艺过程所需的化学药品。例如:氯化铜用于图形转移中金属铜的蚀刻。正是这种溶液的化学特性才使得蚀刻成为可能。第二个目的是保 Introduction The conventional concept of electronic interconnect manufacturing uses the same solution for two purposes: to ensure the reaction characteristics of the solution and the exchange and transfer of reactants. The first purpose is to provide the chemicals needed for the process. For example: Copper chloride is used for the etching of metallic copper in pattern transfer. It is the chemical nature of this solution that makes etching possible. The second purpose is to protect