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本文叙述了液相外延的简单理论及其生长工艺.稳态生长和瞬态生长中的三种冷却技术都是以生长速率取决于溶质向界面的扩散快慢为依据的.砷化镓液相外延所获得的实验结果与理论的一致性证实了本试验是符合扩散理论模式的.瞬态法中的过冷工艺能在几微米到十几微米的范围内获得重复的厚度和良好的表面形态的外延层.对生长厚度在一百微米以上的外延层则稳态法是一种理想的工艺.实验指出:严格舟器的处理,改善系统的密封性,提高保护气氛的纯度以及对生长溶液的高温热处理都会对外延层纯度的提高带来明显的效果.文中列出了各种生长工艺参数对外延层材料的电学性能,厚度控制以及表面形态的影响,并得到了本系统的理想生长工艺条件.薄层外延材料参数能满足器件制造的要求.在变容管和体效应管方面得到了应用,特别是在6毫米体效应管的制作中,得到了更为满意的结果.文章也列出了由瞬态法生长的磷化铟材料液相外延的初步结果.
This paper describes a simple theory of liquid phase epitaxy and its growth process.The steady state growth and transient growth of the three cooling techniques are based on the growth rate depends on the diffusion of solute to the interface speed based on the gallium arsenide liquid phase epitaxy The experimental results obtained are in agreement with the theory and confirm that this experiment is in accordance with the diffusion theory model. The transient cooling process can obtain repeated thickness and good surface morphology in the range of several micrometers to ten micrometers The epitaxial layer growth of more than 100 microns in thickness of the epitaxial layer is the steady state method is an ideal process.Experiments pointed out: rigorous handling of the boat to improve the tightness of the system to improve the purity of the protective atmosphere and the growth solution High temperature heat treatment will have obvious effect on the improvement of the purity of the epitaxial layer.The article lists the various growth process parameters of the epitaxial layer of the electrical properties of materials, thickness control and surface morphology, and obtained the ideal growth conditions of the system . Thin-layer epitaxial material parameters to meet the requirements of device manufacturing in the varactor and body effect tube has been applied, especially in the production of 6 mm body effect tube To obtain a more satisfactory results. Article also lists the preliminary results of indium phosphide material grown by the transient liquid phase epitaxy method.