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本文采用倒筒直流溅射方法 (ICS)结合基片变速双轴旋转方式原位生长Φ3英寸双面YBCO高温超导外延薄膜 .膜厚分布最大偏差小于 1 0 % ,薄膜样品的中心与边缘部分的Tc0均达到 90K ,ΔTc≤ 0 .3K ,FWHM(0 0 5)≈ 0 .2°,Rs(1 0GHz,77K)≈ 0 .8mΩ ,Jc 值分布在 2 .2～3 .1MA·cm-2 之间 ,表明样品均匀性良好 .
In this paper, in-situ growth of Φ3 "double-sided YBCO high-temperature superconducting thin films by inverse cylinder DC sputtering method (ICS) combined with variable-speed biaxial rotation of the substrate.The maximum deviation of the film thickness distribution is less than 10%, the center and edge of the film samples Tc0 reached 90K, ΔTc≤0.3K, FWHM (0 0 5) ≈0. 2 °, Rs (1 0GHz, 77K) ≈0.8mΩ, Jc value distribution in 2.2 ~ 3 .1MA · cm- 2, indicating a good sample uniformity.