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在椭圆偏振仪测量原理的基础上，采用Forouhi-Bloomer模型的参数匹配模型，分析非晶硅的物理性质，利用温度与禁带宽度间的关系，得到利用椭圆偏振仪测试非晶硅薄膜热光系数的方法与非晶硅热光系数的表达式，利用相关文献对其进行验证，验证结果表明，该方法是可行的。
椭圆偏振仪测试非晶薄膜热光系数研究
【摘 要】
：
在椭圆偏振仪测量原理的基础上，采用Forouhi-Bloomer模型的参数匹配模型，分析非晶硅的物理性质，利用温度与禁带宽度间的关系，得到利用椭圆偏振仪测试非晶硅薄膜热光系数的方法与非晶硅热光系数的表达式，利用相关文献对其进行验证，验证结果表明，该方法是可行的。
【机 构】
：
电子科技大学光电信息学院，成都610054
【出 处】
：
半导体光电
【发表日期】
：
2011年32期
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