美国国家科学基金会(NSF)拨款给阿肯色大学的一个工程研究小组和Wispry公司,用于启动开发MEMS器件,同时,给美国能源部的圣地亚国家实验室一笔拨款,以开发MEMS器件新的电子封装技术。这项研究将应用到远程通信、国土安全、生物医学器件、汽车与航天传感器和热元件等产品方面。上 NSF donated funds to a team of engineering researchers at Arkansas University and Wispry to start the development of MEMS devices and at the same time, grant a grant to Sandia National Laboratories of the U.S. Department of Energy to develop new MEMS devices Electronic packaging technology. The research will be applied to telematics, homeland security, biomedical devices, automotive and aerospace sensors and thermal components and other products. on