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自从Setaka等人利用CVD方法在硅等非金刚石衬底上合成出具有清晰结晶晶面的金刚石晶体及多晶金刚石薄膜以来,金刚石的合成技术在近几年取得了迅速的发展。同时,气相生长金刚石的材料性质研究及应用研究也取得了较大的进展。
Since Setaka et al. Used CVD method to synthesize diamond crystals and polycrystalline diamond films with distinct crystal planes on non-diamond substrates such as silicon, the diamond synthesis technology has been rapidly developed in recent years. Meanwhile, the material properties of the vapor grown diamond have also made great progress.